suppression of dynamic offset of electromagnetic drive module for micro-gyroscope

an innovative 3-phase alternative current (ac) drive circuit for the seismic disc in micro-gyroscopes is designed and verified by computer simulations and experiments. the in-plane dynamic model of the seismic disc with mass eccentricity and air gap against the centre bearing and the mathematic expression of two sinusoidal magnetic fields are developed respectively. in order to prevent the seismic disc from collision with the centre bearing and the electromagnetic (em) poles, an anti-collision controller is established by employing two look-up tables which define the intensity of the applied current to the em poles. self-sensing technique is included to measure the real-time offset of the disc by two orthogonal pairs of em poles, without any additional sensors. the drive circuit under sinusoidal pulse width modulation (spwm) operation and the anti-collision strategy are verified by intensive computer simulations via commercial software, orcad 9, and experiments.